Evaporation Boat in Electronic Device Manufacturing: A Key Carrier For Precision Coatings

Evaporation boat in the electronic device manufacturing industry is mainly used in semiconductor chips, flat panel displays, electronic components and other manufacturing processes, as follows:
Semiconductor chip manufacturing
Formation of metal interconnection layer: the chip needs to build complex metal conductive lines to connect the transistors and functional modules. Evaporation boats are commonly used to evaporate metallic materials such as aluminum and copper. In a vacuum environment, the metal material is heated to high temperature evaporation in the evaporation boat, and then deposited on the wafer surface to form a precise metal interconnect pattern through photolithography, etching, and other processes to realize the transmission of electrical signals inside the chip.
Preparation of barrier and diffusion layers: In order to prevent metal ions from diffusing in the chip structure and affecting chip performance, a barrier layer needs to be prepared between the metal layer and the semiconductor layer. Evaporation boats can be used to evaporate materials such as titanium nitride (TiN) as a barrier layer. In addition, in some processes, it is also necessary to evaporate impurity atoms such as boron and phosphorus through the evaporation boat to form a diffusion layer, in order to accurately control the electrical properties of the semiconductor device, such as the formation of P-type or N-type semiconductor region.
Flat Panel Display Manufacturing
Transparent Conductive Electrode Preparation: For both Liquid Crystal Displays (LCDs) and Organic Light Emitting Diode Displays (OLEDs), transparent conductive electrodes are required to drive the pixels to emit light. Evaporation boats can be used to evaporate transparent conductive materials such as Indium Tin Oxide (ITO), which has good conductivity and transparency. ITO is used to form a uniform ITO film on a glass substrate through the evaporation process, and then patterned by photolithography and other processes as an electrode to control charge transfer and pixel luminescence in the display.
Organic Light Emitting Layer Deposition: In OLED display manufacturing, the evaporation boat is the key tool for depositing organic light-emitting materials. By precisely controlling the temperature and evaporation rate of the evaporation boat, the OLED material is evaporated and deposited on the substrate to form an ultra-thin OLED layer. Different organic light-emitting materials can emit different colors of light, through the combination of multi-layer organic light-emitting layer and precise control, can achieve high resolution, high color saturation OLED display.
Electronic Component Manufacturing
Thin Film Resistor Preparation: Thin film resistors are commonly used components in electronic circuits and are realized by depositing a thin film with a specific resistivity on an insulating substrate. Evaporation boats can be used to evaporate resistive materials such as nickel-chromium alloy (NiCr) and tantalum nitride (TaN). By controlling the parameters of the evaporation process, the thickness and resistivity of the film can be precisely controlled, thus realizing the preparation of film resistors with different resistance values to meet the needs of various electronic circuits.
Multilayer Ceramic Capacitor (MLCC) Manufacturing: MLCCs are made of multiple layers of ceramic dielectrics and metal electrodes stacked alternately. Evaporation boats are used in MLCC manufacturing to evaporate internal electrode materials such as palladium (Pd), silver (Ag) and other metals. During the preparation of the ceramic dielectric layer, metal electrodes are deposited on the surface of the ceramic sheet by the evaporation process, and then the multilayer structure is formed by the stacking and sintering processes to achieve high capacitance density and miniaturization of the capacitor.
From the metal contacts of smart phones to the AR glasses permeable film, evaporation boat as the "hero behind the scenes" of the electronic device manufacturing, is through the material innovation and intelligent upgrading, promoting the limit of micro-nano processing technology breakthrough. With the rise of third-generation semiconductors and flexible electronics, evaporation boat technology will continue to evolve and become an indispensable high-end consumable in the industry chain.

Shengyang New Material Co., Ltd. is committed to the production of boron nitride and boron nitride processed products, and can customize various boron nitride insulating ceramic parts according to customer needs. Contact us if necessary.
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