Boron Nitride Evaporation Boats Vs. Tungsten Boats

Nov 20, 2023

Boron Nitride Evaporation Boats vs. Tungsten Boats: Differences and Advantages

Evaporation boats are widely used for the production of thin films and coatings in many industries such as electronics, optics, and automotive. Among various materials used for evaporation boats, boron nitride (BN) and tungsten (W) are two popular choices. Here are the differences and advantages of BN evaporation boats compared to the traditional W boats.

First of all, BN has a much higher thermal conductivity than W. This means that BN evaporation boats can transfer more heat to the substrate during the deposition process, leading to a faster and more uniform deposition rate. Moreover, BN is a chemically inert material, which means it does not react with the materials being evaporated or the gases used in the vacuum chamber. This reduces the chance of contamination and improves the stability and consistency of the thin films.

In addition, BN evaporation boats have a higher melting point than W. BN can withstand temperatures up to 2800°C, while W melts at around 3422°C. This means that BN boats can be used for high-temperature deposition processes, such as reactive sputtering and plasma-enhanced chemical vapor deposition (PECVD), without the risk of boat failure or deformation.

Another advantage of BN evaporation boats is their low vapor pressure. This means that BN does not vaporize during the deposition process, reducing the chance of nucleation and improving the quality and purity of the thin films. Furthermore, BN is a non-toxic material, which makes it a safer choice for use in the vacuum chamber.

In summary, BN evaporation boats have several advantages over W boats, including higher thermal conductivity, chemical inertness, higher melting point, low vapor pressure, and non-toxicity. These properties make BN boats an excellent choice for high-performance thin film deposition in various industrial applications.

 

Shengyang New Material Co., Ltd. is committed to the production of boron nitride and boron nitride processed products, and can customize various boron nitride insulating ceramic parts according to customer needs. Contact us if necessary.
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